Bulletin of the American Physical Society
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Volume 55, Number 7
Monday–Friday, October 4–8, 2010; Paris, France
Session CTP: Poster Session I (11:00-12:30)
11:00 AM,
Tuesday, October 5, 2010
Room: 8 and 251
Abstract ID: BAPS.2010.GEC.CTP.93
Abstract: CTP.00093 : Generation of nitridated silicon particles and their thin film deposition using double multi-hollow discharges*
Preview Abstract
Abstract
Authors:
Giichiro Uchida
(Kyushu University)
Muneharu Sato
(Kyushu University)
Yuuki Kawashima
(Kyushu University)
Kenta Nakahara
(Kyushu University)
Kosuke Yamamoto
(Kyushu University)
Takeaki Matsunaga
(Kyushu University)
Daisuke Yamashita
(Kyushu University)
Hidefumi Matsuzaki
(Kyushu University)
Kunihiro Kamataki
(Kyushu University)
Naho Itagaki
(Kyushu University)
Kazunori Koga
(Kyushu University)
Masaharu Shiratani
(Kyushu University)
*This work was partly supported by New Energy and Industrial Technology Development Organization (NEDO).
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2010.GEC.CTP.93
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