62nd Annual Gaseous Electronics Conference
Volume 54, Number 12
Tuesday–Friday, October 20–23, 2009;
Saratoga Springs, New York
Session Index
Session FT1: Capacitively-Coupled Plasmas I
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Chair: Amy Wendt, University of Wisconsin
Room: Saratoga Hilton Ballroom 1
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Tuesday, October 20, 2009
8:00AM - 8:30AM
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FT1.00001: The electrical asymmetry effect in capacitive discharges
Invited Speaker:
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Tuesday, October 20, 2009
8:30AM - 8:45AM
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FT1.00002: Experimental investigations of the Electrical Asymmetry Effect
Julian Schulze, Edmund Schuengel, Dirk Luggenhoelscher, Uwe Czarnetzki, Zoltan Donko
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Tuesday, October 20, 2009
8:45AM - 9:00AM
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FT1.00003: Dual-frequency capacitive radiofrequency discharges: Effect of low-frequency power on electron density and flux
Jean-Paul Booth, Garrett Curley, Dragana Maric, Jerome Bredin, Pascal Chabert
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Tuesday, October 20, 2009
9:00AM - 9:15AM
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FT1.00004: Non-linear frequency coupling in dual radio-frequency atmospheric pressure plasmas
Jochen Waskoenig, Timo Gans
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Tuesday, October 20, 2009
9:15AM - 9:30AM
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FT1.00005: EED$f$ of the DC+RF Hybrid Etcher: Simulation and Measurement
Lee Chen, Lin Xu, Merritt Funk
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