Bulletin of the American Physical Society
62nd Annual Gaseous Electronics Conference
Volume 54, Number 12
Tuesday–Friday, October 20–23, 2009; Saratoga Springs, New York
Session AM: Kinetics Workshop: Opening Session, Role of Electron Kinetics, Swarms |
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Chair: Zoran Petrovic, Institute of Physics Room: Saratoga Hilton Ballroom 1 |
Monday, October 19, 2009 7:45AM - 8:15AM |
AM.00001: Introduction and Welcome |
Monday, October 19, 2009 8:15AM - 8:45AM |
AM.00002: Controlling electron energy distributions for plasma technologies Invited Speaker: The basic function of low temperature plasmas in society benefiting technologies is to channel power into specific modes of atoms and molecules to excite desired states or produce specified radicals. This functionality ultimately depends on the ability to craft an electron energy distribution (EED) to match cross sections. Given electric fields, frequencies, gas mixtures and pressures, predicting EEDs and excitation rates can in large part be reliably done. The inverse problem, specifying the conditions that produce a given EED, is less well understood. Early strategies to craft EEDs include adjusting gas mixtures, such as the rare gas-Hg mixtures in fluorescent lamps, and externally sustained discharges, such as electron-beam sustained plasmas for molecular lasers. More recent strategies include spiker-sustainer circuitry which produces desired EEDs in non-self-sustained plasmas; and adjusting frequency in capacitively coupled plasmas. In this talk, past strategies for customizing EEDs in low pressure plasmas will be reviewed and prospects for improved control of plasma kinetics will be discussed using results from 2-dimensional computer models. [Preview Abstract] |
Monday, October 19, 2009 8:45AM - 9:15AM |
AM.00003: Incorporating swarm data into plasma models and plasma surface interactions Invited Speaker: Since the mid-1980s, modeling of non-equilibrium plasmas in a collisional region driven at radio frequency has been developed at pressure greater than $\sim $Pa. The collisional plasma has distinct characteristics induced by a quantum property of each of feed gas molecules through collisions with electrons or heavy particles. That is, there exists a proper function caused by chemically active radicals, negative-ions, and radiations based on a molecular quantum structure through short-range interactions mainly with electrons. This differs from high-density, collisionless plasma controlled by the long-range Coulomb interaction. The quantum property in the form of the collision cross section is the first essential through swarm parameters in order to investigate the collisional plasma structure and to predict the function. These structure and function, of course, appear under a self- organized spatiotemporal distribution of electrons and positive ions subject to electromagnetic theory, i.e., bulk-plasma and ion-sheath. In a plasma interacting with a surface, the flux, energy and angle of particles incident on a surface are basic quantities. It will be helpful to learn the limits of the swarm data in a quasi-equilibrium situation and to find a way out of the difficulty, when we predict the collisional plasma, the function, and related surface processes. In this talk we will discuss some of these experiences in the case of space and time varying radiofrequency plasma and the micro/nano-surface processes. This work is partly supported by Global-COE program in Keio University, granted by MEXT Japan. [Preview Abstract] |
Monday, October 19, 2009 9:15AM - 9:45AM |
AM.00004: Recent advances in the kinetic theory of hydrodynamic and non-hydrodynamic charged particle swarms in gases Invited Speaker: Recent developments in plasma processing technology using non-equilibrium plasma discharges have led to a resurgence of interest in the fundamental kinetic theory of charged particles in gases. In this work we outline the current status of both the hydrodynamic and non-hydrodynamic kinetic theory of charged particle swarms with the goal of reconciling the plasma and swarm literature. Three fundamental issues: (i) the temporal and spatial non-local behavior; (ii) the effects of magnetic fields and field orientations on the transport properties, and (iii) the duality in transport coefficients arising from non-conservative collisions (attachment/ionization), are discussed for electrons for certain model and real gases. Much research has been devoted to interpretation of transport data obtained under different experimental arrangements and their proper use in plasma models. Two complimentary techniques are employed: a multi term solution of Boltzmann's equation and Monte Carlo simulation technique, both adapted to consider the time-dependent hydrodynamic and steady state non-hydrodynamic conditions. New and significant numerical results are presented to highlight the rich and diverse range of kinetic phenomena observed in varying configurations of time-dependent electric and magnetic fields. We systematically study the origin and mechanisms for such phenomena, their sometimes paradoxical manifestations and possible physical implications which arise from their explicit inclusion into plasma models. [Preview Abstract] |
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