60th Gaseous Electronics Conference
Volume 52, Number 9
Tuesday–Friday, October 2–5, 2007;
Arlington, Virginia
Session Index
Session VF1: Materials Processing in Low Pressure Plasmas II: Etching, deposition, new materials
Chair: Evgeniya Lock, Naval Research Laboratory
Room: Doubletree Crystal City Crystal Ballroom A
Friday, October 5, 2007
8:00AM - 8:30AM
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VF1.00001: Reaction of Fluorocarbon Species with Si and SiO$_{2}$ Surfaces
Invited Speaker:
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Friday, October 5, 2007
8:30AM - 8:45AM
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VF1.00002: Modeling high aspect ratio contact etch of SiO$_{2}$
Phillip Stout
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Friday, October 5, 2007
8:45AM - 9:00AM
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VF1.00003: Time dependence analysis of the 3D profile charging during $SiO_2$ etching in $Ar^{+}$/$CF_4$ plasma
Branislav Radjenovic, Marija Radmilovic-Radjenovic, Zoran Petrovic
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Friday, October 5, 2007
9:00AM - 9:15AM
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VF1.00004: Plasma Modeling for Cu barrier/seed applications
Prashanth Kothnur, Ananth Bhoj, Ron Kinder
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Friday, October 5, 2007
9:15AM - 9:30AM
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VF1.00005: Spatial distributions of Cu particulates in high-pressure magnetron sputtering plasmas studied by laser light scattering
N. Nafarizal, N. Takada, K. Sasaki, M. Ikeda, Y. Sago
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Friday, October 5, 2007
9:30AM - 9:45AM
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VF1.00006: Multi-hollow discharge plasma CVD reactor with magnets for highly stable a-Si:H film deposition
Kazunori Koga, William M. Nakamura, Hiroshi Satou, Hiroomi Miyahara, Masaharu Shiratani
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Friday, October 5, 2007
9:45AM - 10:00AM
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VF1.00007: Control of structures of Carbon Nanowalls in plasma enhanced CVD
Wakana Takeuchi, Yutaka Tokuda, Mineo Hiramatsu, Hiroyuki Kano, Masaru Hori
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Session VF2: Plasma Diagnostics I
Chair: Alex Paterson, Applied Materials
Room: Doubletree Crystal City Crystal Ballroom B
Friday, October 5, 2007
8:00AM - 8:30AM
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VF2.00001: Reflections on Electric Probes
Invited Speaker:
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Friday, October 5, 2007
8:30AM - 8:45AM
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VF2.00002: Xenon operation of the Non-ambipolar Electron Source
Noah Hershkowitz, Ben Longmier
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Friday, October 5, 2007
8:45AM - 9:00AM
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VF2.00003: Nanoparticle charging in weakly ionized gases
Marco Francesco Gatti, Uwe Kortshagen
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Friday, October 5, 2007
9:00AM - 9:15AM
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VF2.00004: Electric probes for characterization of microwave produced plasma.
Vipin K. Yadav
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Friday, October 5, 2007
9:15AM - 9:30AM
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VF2.00005: The Bohm Criterion Revisited
Natalia Sternberg, Valery Godyak
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Friday, October 5, 2007
9:30AM - 9:45AM
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VF2.00006: First experimental test of the generalized Bohm criterion using Ar$^{+}$ and Xe$^{+}$ LIF in Ar-Xe plasmas
Dongsoo Lee, Noah Hershkowitz, Greg Severn
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Friday, October 5, 2007
9:45AM - 10:00AM
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VF2.00007: Numerical Solutions for Langmuir Probes
Richard Fernsler
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