60th Gaseous Electronics Conference
Volume 52, Number 9
Tuesday–Friday, October 2–5, 2007;
Arlington, Virginia
Session Index
Session QR1: Plasma Sources
Chair: Yohei Yamazawa, Tokyo Electron
Room: Doubletree Crystal City Crystal Ballroom A
Thursday, October 4, 2007
10:00AM - 10:15AM
|
|
QR1.00001: Two-dimensional Collisionless Weakly-ionized Plasma in Fluid Approximation
Valery Godyak, Natalia Sternberg
Preview Abstract |
Thursday, October 4, 2007
10:15AM - 10:30AM
|
|
QR1.00002: Capacitive Discharges Driven by Combined DC/RF Sources
M.A. Lieberman, Emi Kawamura, A.J. Lichtenberg, E.A. Hudson
Preview Abstract |
Thursday, October 4, 2007
10:30AM - 10:45AM
|
|
QR1.00003: RF discharge under the influence of a magnetic field
Ed Barnat, Paul Miller, Alex Paterson
Preview Abstract |
Thursday, October 4, 2007
10:45AM - 11:00AM
|
|
QR1.00004: The effect of radio-frequency bias on electron density in an inductively coupled plasma reactor, measured by a wave cutoff probe
Mark Sobolewski, Jung-Hyung Kim
Preview Abstract |
Thursday, October 4, 2007
11:00AM - 11:15AM
|
|
QR1.00005: Seasoning of Plasma Reactors: Feedback Control Strategies to Counter Wafer-to-Wafer Drifts
Ankur Agarwal, Mark J. Kushner
Preview Abstract |
Thursday, October 4, 2007
11:15AM - 11:30AM
|
|
QR1.00006: Diagnostics of continuous electron beam-generated plasma for material processing
Evgeniya Lock, Scott Walton, Richard Fernsler
Preview Abstract |
Thursday, October 4, 2007
11:30AM - 11:45AM
|
|
QR1.00007: Student Excellence Award Finalist: Double layers at anode spots in low-pressure plasma
Scott Baalrud, Noah Hershkowitz
Preview Abstract |
Thursday, October 4, 2007
11:45AM - 12:00PM
|
|
QR1.00008: Study of discharge characteristics on transition from metallic to reactive mode in radio frequency magnetron plasma
Joyanti Chutia, Hemen Kakati, Arup Ratan Pal, Heremba Bailung
Preview Abstract |
Session QR2: Electron-Atom Collisions
Chair: Michael Brunger, Flinders University
Room: Doubletree Crystal City Crystal Ballroom B
Thursday, October 4, 2007
10:00AM - 10:30AM
|
|
QR2.00001: Studies of Electron-Impact Induced Ionization of Atoms and Molecules Using Multi-Particle Imaging Techniques
Invited Speaker:
Preview Abstract |
Thursday, October 4, 2007
10:30AM - 10:45AM
|
|
QR2.00002: Positron scattering from helium
Casten Makochekanwa, Adric Jones, Peter Caradonna, Stephen Buckman, James Sullivan
Preview Abstract |
Thursday, October 4, 2007
10:45AM - 11:00AM
|
|
QR2.00003: Inner-shell photodetachment of Na$^-$ and electron-impact ionization of auto-ionizing states in Na.
Oleg Zatsarinny, Klaus Bartschat, A.A. Borovik
Preview Abstract |
Thursday, October 4, 2007
11:00AM - 11:15AM
|
|
QR2.00004: Projectile Interactions in Simultaneous Excitation-Ionization of Helium
A.L. Harris, M. Foster, J.L. Peacher, D.H. Madison
Preview Abstract |
Thursday, October 4, 2007
11:15AM - 11:30AM
|
|
QR2.00005: Charged-particle impact of quasi-two electron atoms
Klaus Bartschat, Xiaoxu Guan, Daniel Weflen
Preview Abstract |
Thursday, October 4, 2007
11:30AM - 12:00PM
|
|
QR2.00006: Recent Progress in Calculations of Electron-Impact Excitation of Rare Gases and its Impact on Gaseous Electronic Applications
Invited Speaker:
Preview Abstract |
