Bulletin of the American Physical Society
60th Gaseous Electronics Conference
Volume 52, Number 9
Tuesday–Friday, October 2–5, 2007; Arlington, Virginia
Session QR1: Plasma Sources
10:00 AM–12:00 PM,
Thursday, October 4, 2007
Doubletree Crystal City
Room: Crystal Ballroom A
Chair: Yohei Yamazawa, Tokyo Electron
Abstract ID: BAPS.2007.GEC.QR1.6
Abstract: QR1.00006 : Diagnostics of continuous electron beam-generated plasma for material processing*
11:15 AM–11:30 AM
Preview Abstract Abstract
Authors:
Evgeniya Lock
Scott Walton
(Plasma Physics Division, Naval research Laboratory, Washington, DC 20375)
Richard Fernsler
(Plasma Physics Division, Naval Research Laboratory, WAshington, DC 20375)
*This work was supported by the Office of Naval Research.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2007.GEC.QR1.6
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