60th Gaseous Electronics Conference
Volume 52, Number 9
Tuesday–Friday, October 2–5, 2007;
Arlington, Virginia
Session Index
Session QR1: Plasma Sources
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Show Abstracts |
Chair: Yohei Yamazawa, Tokyo Electron
Room: Doubletree Crystal City Crystal Ballroom A
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Thursday, October 4, 2007
10:00AM - 10:15AM
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QR1.00001: Two-dimensional Collisionless Weakly-ionized Plasma in Fluid Approximation
Valery Godyak, Natalia Sternberg
Preview Abstract |
Thursday, October 4, 2007
10:15AM - 10:30AM
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QR1.00002: Capacitive Discharges Driven by Combined DC/RF Sources
M.A. Lieberman, Emi Kawamura, A.J. Lichtenberg, E.A. Hudson
Preview Abstract |
Thursday, October 4, 2007
10:30AM - 10:45AM
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QR1.00003: RF discharge under the influence of a magnetic field
Ed Barnat, Paul Miller, Alex Paterson
Preview Abstract |
Thursday, October 4, 2007
10:45AM - 11:00AM
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QR1.00004: The effect of radio-frequency bias on electron density in an inductively coupled plasma reactor, measured by a wave cutoff probe
Mark Sobolewski, Jung-Hyung Kim
Preview Abstract |
Thursday, October 4, 2007
11:00AM - 11:15AM
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QR1.00005: Seasoning of Plasma Reactors: Feedback Control Strategies to Counter Wafer-to-Wafer Drifts
Ankur Agarwal, Mark J. Kushner
Preview Abstract |
Thursday, October 4, 2007
11:15AM - 11:30AM
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QR1.00006: Diagnostics of continuous electron beam-generated plasma for material processing
Evgeniya Lock, Scott Walton, Richard Fernsler
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Thursday, October 4, 2007
11:30AM - 11:45AM
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QR1.00007: Student Excellence Award Finalist: Double layers at anode spots in low-pressure plasma
Scott Baalrud, Noah Hershkowitz
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Thursday, October 4, 2007
11:45AM - 12:00PM
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QR1.00008: Study of discharge characteristics on transition from metallic to reactive mode in radio frequency magnetron plasma
Joyanti Chutia, Hemen Kakati, Arup Ratan Pal, Heremba Bailung
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