Bulletin of the American Physical Society
60th Gaseous Electronics Conference
Volume 52, Number 9
Tuesday–Friday, October 2–5, 2007; Arlington, Virginia
Session CT1: Capacitively Coupled Discharges
10:00 AM–12:00 PM,
Tuesday, October 2, 2007
Doubletree Crystal City
Room: Crystal Ballroom A
Chair: Zoran Petrovic, Institute of Physics, Belgrade
Abstract ID: BAPS.2007.GEC.CT1.4
Abstract: CT1.00004 : Electron heating and ionization mechanisms in capacitively coupled dual frequency plasmas
11:00 AM–11:15 AM
Preview Abstract Abstract
Authors:
Egmont Semmler
(Ruhr-University Bochum)
Deborah O'Connell
(Ruhr-University Bochum)
Timo Gans
(Queens University Belfast)
Peter Awakowicz
(Ruhr-University Bochum)
Achim von Keudell
(Ruhr-University Bochum)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2007.GEC.CT1.4
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