60th Gaseous Electronics Conference
Volume 52, Number 9
Tuesday–Friday, October 2–5, 2007;
Arlington, Virginia
Session Index
Session CT1: Capacitively Coupled Discharges
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Chair: Zoran Petrovic, Institute of Physics, Belgrade
Room: Doubletree Crystal City Crystal Ballroom A
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Tuesday, October 2, 2007
10:00AM - 10:30AM
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CT1.00001: Electron heating in dual-frequency capacitive discharges
Invited Speaker:
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Tuesday, October 2, 2007
10:30AM - 10:45AM
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CT1.00002: Ionisation dynamics and frequency coupling in dual frequency capacitively coupled plasmas
D. O'Connell, T. Gans, E. Semmler, P. Awakowicz, A.R. Ellingboe, M.M. Turner
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Tuesday, October 2, 2007
10:45AM - 11:00AM
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CT1.00003: Student Excellence Award Finalist: Electron heating in asymmetric capacitively coupled RF discharges at low pressures
Julian Schulze, Brian Heil, Dirk Luggenhoelscher, Uwe Czarnetzki
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Tuesday, October 2, 2007
11:00AM - 11:15AM
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CT1.00004: Electron heating and ionization mechanisms in capacitively coupled dual frequency plasmas
Egmont Semmler, Deborah O'Connell, Timo Gans, Peter Awakowicz, Achim von Keudell
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Tuesday, October 2, 2007
11:15AM - 11:30AM
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CT1.00005: Numerical modelling of electron beams accelerated by the RF plasma boundary sheath
B.G. Heil, J. Schulze, D. Luggenh\"olscher, U. Czarnetzki, T. Mussenbrock, R.P. Brinkmann
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Tuesday, October 2, 2007
11:30AM - 11:45AM
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CT1.00006: Discharge Electrode Impedance Effect on Nonlinear Wave Generation in Dual-Frequency Capacitively Coupled Plasma
Yohei Yamazawa
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Tuesday, October 2, 2007
11:45AM - 12:00PM
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CT1.00007: Analogy between electron heating mechanisms in symmetric dual and asymmetric single frequency capacitive RF discharges
Julian Schulze, Brian Heil, Dirk Luggenhoelscher, Uwe Czarnetzki, Bert Ellingboe
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