|
|
SRP1.00001: INDUCTIVELY COUPLED PLASMAS
Preview Abstract |
|
|
SRP1.00002: Real time closed loop control of an Ar and Ar/O$_2$ plasma in an ICP
R. Faulkner, F. Sober\'on, A. McCarter, D. Gahan, S. Karkari, V. Milosavljevic, C. Hayden, A. Islyaikin, V.J. Law, M.B. Hopkins, B. Keville, P. Iordanov, S. Doherty, J.V. Ringwood
Preview Abstract |
|
|
SRP1.00003: Electrical and plasma parameters of side type ferromagnetic ICP
Kyeong Hyo Lee, Young Kwang Lee, Sung Won Cho, Chin Wook Chung
Preview Abstract |
|
|
SRP1.00004: On the E to H and H to E transition mechanisms in inductively coupled plasmas
MinHyong Lee, KyeongHyo Lee, ChinWook Chung
Preview Abstract |
|
|
SRP1.00005: On the multistep ionizations in argon inductively coupled plasms
MinHyong Lee, SungHo Jang, ChinWook Chung
Preview Abstract |
|
|
SRP1.00006: Diagnostics for an inductively coupled plasma in highly Ar-diluted oxygen
Zhang Yong, Satoshi Hirao, Takeshi Ohmori, Takeshi Kitajima, Toshiaki Makabe
Preview Abstract |
|
|
SRP1.00007: Dynamics of an E-H transition in ICP in Ar
Satoshi Hirao, Yong Zhang, Toshiaki Makabe
Preview Abstract |
|
|
SRP1.00008: Experimental Study on Radio Frequency Inductively Coupled Ar/NF$_3$ Discharges
Katsuyuki Hanaki, Takashi Kimura
Preview Abstract |
|
|
SRP1.00009: Probe Measurements and Optical Emission Spectroscopy in RF Inductively Coupled Ar/SF$_6$ Discharges
Takashi Kimura, Michio Mabuchi
Preview Abstract |
|
|
SRP1.00010: Studies of Mode Transitions in Inductively Coupled Plasma Reactors
Andre Daltrini, Stanislav Moshkalev, Thomas Morgan, William Graham
Preview Abstract |
|
|
SRP1.00011: Measurements of Nonlocal Electron Energy Distribution Functions in the Afterglow of an RF ICP Discharge
Jon Blessington, Charles DeJoseph, Jr., Vladimir Demidov, Mark Koepke, Jason Wynne
Preview Abstract |
|
|
SRP1.00012: CAPACITIVELY COUPLED PLASMAS II
Preview Abstract |
|
|
SRP1.00013: Radio-frequency phase-modulation of spatial electron density in a two-frequency confined capacitive coupled discharge
S.K. Karkari, C. Gaman, A.R. Ellingboe
Preview Abstract |
|
|
SRP1.00014: ABSTRACT WITHDRAWN
Preview Abstract |
|
|
SRP1.00015: ABSTRACT WITHDRAWN
Preview Abstract |
|
|
SRP1.00016: Investigation of the Spatial Distribution Evolution of Electron Temperature in Capacitive Coupled Single- and Dual-Frequency RF Plasmas in Ar/O$_{2}$ mixture over the RF Period.
S.G. Belostotsky, O.V. Braginsky, A.S. Kovalev, D.V. Lopaev, T.V. Rakhimova, A.N. Vasilieva
Preview Abstract |
|
|
SRP1.00017: Capacitive Coupled Single- and Dual-Frequency RF Plasma in Argon
Olga Proshina, Oleg Braginsky, Vladimir Ivanov, Alexander Kovalev, Dmitry Lopaev, Tatyana Rakhimova, Anna Vasilieva
Preview Abstract |
|
|
SRP1.00018: Experimental and Theoretical Study of Ion Energy Distribution in SF and DF CCP discharges
Olga Proshina, Oleg Braginsky, Alexander Kovalev, Dmitry Lopaev, Yury Mankelevich, Mike Olevanov, Tatyana Rakhimova, Anna Vasilieva, Dmitry Voloshin
Preview Abstract |
|
|
SRP1.00019: Optical emission CT of etching plasmas for an effect of the anode phase of LF-bias voltage in a 2f-CCP in Ar and CF$_{4}$/Ar
Mikio Ishimaru, Takeshi Ohmori, Takeshi Kitajima, Toshiaki Makabe
Preview Abstract |
|
|
SRP1.00020: Low-pressure gas breakdown in dual-frequency (27/2 MHz) RF electric fields in nitrogen
Valeriy Lisovskiy, Jean-Paul Booth, Karine Landry, David Douai, Valerick Cassagne, Vladimir Yegorenkov
Preview Abstract |
|
|
SRP1.00021: Optical Emission Measurements of Dual Frequency Capacitively Coupled Plasmas
Eric Benck, Kristen Steffens
Preview Abstract |
|
|
SRP1.00022: COLLISION PROCESSES IN DISCHARGES AND PLASMAS
Preview Abstract |
|
|
SRP1.00023: Excitation of the near-uv continuum of H$_2$ by fast H atoms
A.V. Phelps
Preview Abstract |
|
|
SRP1.00024: Possible Mechanism of ``Additional'' Production of H$^{-}$ in a Glow Discharge
S. Belostotskiy, D. Economou, D. Lopaev, T. Rakhimova
Preview Abstract |
|
|
SRP1.00025: Model calculations of the ``flame'' in flowing-afterglow plasmas
Rainer Johnsen, Richard Rosati, Michael Golde
Preview Abstract |
|
|
SRP1.00026: Dissociation, recombination and detachment in oxygen discharges diluted with argon
Jon T. Gudmundsson, Eythor G. Thorsteinsson
Preview Abstract |
|
|
SRP1.00027: Pump/Probe measurement of V-V transfer in O$_{2}$ and H$_{2}$
Tai Ahn, Igor Adamovich, Walter Lempert
Preview Abstract |
|
|
SRP1.00028: Alignment relaxation and disorientation of Ne*(2p$_{i}$) atoms induced by collisions with He(1s$^{2}$)
Cristian Bahrim, Vaibhav Khadilkar
Preview Abstract |
|
|
SRP1.00029: The sensitivity of calculated ion transport coefficients for testing ion-neutral interaction potentials
Mark Hogan
Preview Abstract |
|
|
SRP1.00030: Mobility of O$^{+}$ in He, Ne and Ar and Interaction Potentials of HeO$^{+}$, NeO$^{+}$ and ArO$^{+}$
Daniel Danailov, Larry Viehland, Rainer Johnsen, Timothy Wright, Edmond Lee
Preview Abstract |
|
|
SRP1.00031: Temperature dependence of argon excimer emission from pulsed discharge excited argon clusters
Mark Masters, Hans Suedhoff, Mike De Armond, Clint Reynolds
Preview Abstract |
|
|
SRP1.00032: Effects of Electron Exchange in Fully Differential Cross Sections for Charged Particle Ionization
A.L. Harris, M. Foster, J.L. Peacher, D.H. Madison, H.P. Saha, K. Bartschat
Preview Abstract |
|
|
SRP1.00033: Low-Energy Electron Impact Ionization of Molecular Hydrogen
J.G. Childers, Kelly Kuper, Murtadha A. Khakoo
Preview Abstract |
|
|
SRP1.00034: Laser optogalvanic spectroscopy of neon and krypton in a discharge plasma
Naveed Piracha, Kurt Nesbett, Sohala Moten, Phil Moeller
Preview Abstract |
|
|
SRP1.00035: Importance of Relativistic effects and Exchange between Bound and Continuum Electrons on Electron Impact Ionization of Xenon.
Z. Stegen, D.H. Madison, H.P. Saha, K. Bartschat, S. Bellm, J. Lower, R.P. McEachran, E. Weigold
Preview Abstract |
|
|
SRP1.00036: The role of chemi-ionization in fluorescent lamp discharges
Abdur Rahman, Graeme Lister, Valery Sheverev
Preview Abstract |