Bulletin of the American Physical Society
2006 59th Annual Gaseous Electronics Conference
Tuesday–Friday, October 10–13, 2006; Columbus, Ohio
Session RR1: Material Processing in Low Pressure Plasmas
1:30 PM–3:30 PM,
Thursday, October 12, 2006
Holiday Inn
Room: Salon CD
Chair: Jean-Paul Booth, Ecole Polytechnic
Abstract ID: BAPS.2006.GEC.RR1.3
Abstract: RR1.00003 : Study of Nano-Contact Etching Characteristics Using C6F6 Gas.
2:15 PM–2:30 PM
Preview Abstract Abstract
Authors:
Jong-Woo Sun
Sung-Chan Park
Chul Ho Shin
Chang Jin Kang
Han Ku Cho
Joo Tae Moon
(Process Development Team, Semiconductor R\&D Center, Samsung Electronics)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2006.GEC.RR1.3
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