Examining the Effect of HiPIMS Sputtering Process Parameters on Permeability*

Experimental efforts in Inertial Confinement Fusion (ICF) involve the use of hollow, spherical capsules made from various compositions, including metals required for experiments at Los Alamos National Lab (LANL) for double-shell configurations and Lawrence Livermore National Laboratory (LLNL) for pushered single-shell (PSS) setups. Metals of interest include Cr, Mo, W, Be, and others, along with alloys and graded materials. These capsules must feature smooth surfaces and be impermeable, capable of retaining gaseous hydrogen isotopes for an extended period before implosion.

Traditional Direct Current (DC) sputtering has proven challenging in creating impermeable metal capsules. Therefore, we are investigating High Power Impulse Magnetron Sputtering (HiPIMS), renowned for producing dense thin-film coatings. Our research involves comparing DC and HiPIMS techniques for metal films, and exploring HiPIMS as a method to manufacture improved metal capsules that are homogeneous, dense, and impermeable to gases. Parametric studies of HiPIMS metal films will also be presented to assess their impact on metal permeability