Bulletin of the American Physical Society
64th Annual Meeting of the APS Division of Plasma Physics
Volume 67, Number 15
Monday–Friday, October 17–21, 2022; Spokane, Washington
Session GP11: Poster Session III: In-Person, Hall A (9:30-11:00am) and Virtual Poster Presentations (11:15am-12:30pm)
MFE: DIII-D
Low Temperature Plasma
FUND: Dusty Plasmas; Plasma Sources
9:30 AM - 12:30 PM
Tuesday, October 18, 2022
Room: Exhibit Hall A and Online
Abstract: GP11.00111 : Particle-in-cell simulation of electron and ion dynamics in low pressure capacitively coupled plasma discharges operated by pulsed radio-frequency (RF)*
Presenter:
Igor D Kaganovich
(Princeton Plasma Physics Laboratory, Princeton, Princeton University, USA)
Authors:
Sarveshwar Sharma
(Institute for plasma research, Near Indira Birdge, Bhat, Gandhinagar, Gujarat, India)
Soham Banerjee
(Department of Physics, Birla Institute of Technology and Science-Pilani, India)
Peng Tian
(Applied Materials Inc)
Jason Kenney
(Applied Materials Inc)
Shahid Rauf
(Applied Materials Inc)
Dmytro Sydorenko
(University of Alberta, Edmonton, Alberta T6G 2E1, Canada)
Alexander V Khrabrov
(Princeton Plasma Physics Laboratory, Princeton, Princeton University, USA)
Igor D Kaganovich
(Princeton Plasma Physics Laboratory, Princeton, Princeton University, USA)
*The work of I.K. was supported by the Princeton Collaborative Research Facility (PCRF), which is funded by the U.S. Department of Energy (DOE) under Contract No. DE-AC02– 09CH11466.
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