Bulletin of the American Physical Society
74th Annual Meeting of the APS Division of Fluid Dynamics
Volume 66, Number 17
Sunday–Tuesday, November 21–23, 2021; Phoenix Convention Center, Phoenix, Arizona
Session F07: Rarefied Flows
5:25 PM–6:43 PM,
Sunday, November 21, 2021
Room: North 122 C
Chair: Patrick Jenny, ETH Zurich
Abstract: F07.00003 : Numerical study of internal flow behavior at low vacuum in semiconductor industry*
5:51 PM–6:04 PM
Presenter:
Injae Lee
(Samsung Electronics)
Authors:
Injae Lee
(Samsung Electronics)
Yebin Nam
(Samsung Electronics)
Ki-Hoon Kim
(Samsung Electronics)
Sanghoon Lee
(Samsung Electronics)
Sunghyup Kim
(Samsung Electronics)
Sung-Gwang Lee
(Seoul National University)
Hanjune Park
(Seoul National University)
Wontae Hwang
(Seoul National University)
*Supported by Samsung Electronics (RRH0120ZZ-04RF)
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