Bulletin of the American Physical Society
55th Annual Meeting of the APS Division of Atomic, Molecular and Optical Physics
Monday–Friday, June 3–7, 2024; Fort Worth, Texas
Session A01: DAMOP Prize Session - Ramsey Prize Winner & Allis Prize Winner
8:00 AM–10:15 AM,
Tuesday, June 4, 2024
Room: Ballroom B
Chair: Ana Rey, University of Colorado, Boulder
Abstract: A01.00005 : Will Allis Prize Talk: Plasma Etching of Silicon: 50 Years and Still Surprises*
9:45 AM–10:15 AM
Presenter:
Vincent Donnelly
(University of Houston)
Author:
Vincent Donnelly
(University of Houston)
*Financial supported by the National Science Foundation (PHY-1500518) and the Department of Energy, Office of Fusion Energy Science (DE –SC0001939).
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