Will Allis Prize for the Study of Ionized Gases Winner: Low Temperature Plasma-Surface Interactions: From Computer Chips to Cancer Therapy*

Low temperature plasmas (LTPs) are virtually always bounded by surfaces and the nature of the interaction often dominates the plasma physics, chemistry and applications. In this talk, I will present an overview of low temperature plasma-surface interactions with an emphasis on what has been learned during the last several decades. The remarkable evolution of low pressure LTP etching technology and more recent developments in biomedical applications of atmospheric pressure LTP will serve as key examples.