Bulletin of the American Physical Society
2008 APS March Meeting
Volume 53, Number 2
Monday–Friday, March 10–14, 2008; New Orleans, Louisiana
Session Y6: Industrial Advanced Characterizations |
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Sponsoring Units: FIAP Chair: Mark Disko, Exxon Mobile Research and Engineering Co. Room: Morial Convention Center RO4 |
Friday, March 14, 2008 11:15AM - 11:51AM |
Y6.00001: Local strain analysis for CMOS technology by Raman and Nano-Raman spectroscopy Invited Speaker: In present and future high performance CMOS devices, the dedicated introduction of mechanical strain into active silicon regions is an important challenge to progress technology. For both basic understanding of the structure-strain relationship and for developing improved device structures, local measurement of the strain state has become essential. A promising technique that meets these requirements is Raman spectroscopy, enabling strain and composition determination in silicon structures on the $\mu $m-scale with high accuracy. Locally enhanced Raman intensities due to tip enhanced Raman spectroscopy (TERS) can be utilized to downscale the spatial resolution of Raman spectroscopy significantly below the optical diffraction limit. It will be shown for various strained silicon and silicon-germanium film structures, that optical near-field information can be obtained on a scale promising for CMOS device characterization. Local strain measurements are achieved utilizing TERS with metal coated AFM tips positioned in the region of interest. Experimental results of $\mu $Raman and of TERS scans for the strain distribution in island and line structures of thin films are discussed as well as possibilities and limitations for further improvement of the spatial Raman resolution. [Preview Abstract] |
Friday, March 14, 2008 11:51AM - 12:27PM |
Y6.00002: Hydrogen storage by physisorption on Metal Organic Frameworks Invited Speaker: Cryo-adsorption systems based on materials with high specific surface areas have the main advantage that they can store and release hydrogen with fast kinetics and high reversibility over multiples cycles. Recently Metal Organic Frameworks (MOFs) have been proposed as promising adsorbents for hydrogen. These crystallographically well organized hybrid solids resulting from the three dimensional connection of inorganic clusters using organic linkers show the largest specific surface areas of all known crystalline solids. The determination of the relationships between physical properties (chemistry, structure, surface area {\ldots}) of the MOFs and their hydrogen storage behavior is a key step in the characterization of these materials, if they are to be designed for hydrogen storage applications. Excess hydrogen sorption measurements for different MOFs will be presented. We show that maximum hydrogen uptake at high pressure and 77K does not always scale with the specific surface area. A linear correlation trend only apply within a class of specific materials and breaks down when the surface area measurement does not represent the surface sites that are available to H2. The influence of pore size and shape will also be discussed by comparing several MOFs with different structure types. The hydrogen adsorption and binding energy at low pressure are strongly dependent on the metal ions and the pore size. [Preview Abstract] |
Friday, March 14, 2008 12:27PM - 1:03PM |
Y6.00003: Characterization of the pore geometry of porous media and the saturating fluids using 2-dimensional diffusion - NMR relaxation measurements Invited Speaker: |
Friday, March 14, 2008 1:03PM - 1:39PM |
Y6.00004: Non- linear Optical Spectroscopy of Interfaces Invited Speaker: The critical role played by interfaces can be extended to areas such as nanometer size sensors, electronic devices, fuel cells, composite materials, corrosion, lubrication, oil recovery, catalysis, biology, and aqueous environments. The development of superior technologies in these areas can be driven by rapid advances in interfacial science. Second-order nonlinear optical spectroscopy, particularly sum-frequency generation (SFG) spectroscopy, is well suited for advanced characterization of interfaces. It possesses long penetration depths and intrinsic interface specificity. This talk discusses the general principle of SFG spectroscopy as applied in a petrochemical industry with brief examples related to polymer surfaces, aqueous/oxide interfaces and adsorption of molecular additives from liquid onto solid surfaces. [Preview Abstract] |
Friday, March 14, 2008 1:39PM - 2:15PM |
Y6.00005: Development of Silicide Contacts for CMOS devices: Advantages of using Synchrotron Radiation Invited Speaker: Silicide films have been used for close to two decades as the contact to the source, drain and gate of state-of-the-art complementary-metal-oxide-semiconductor (CMOS) devices. The desired properties for this contact layer have limited the choice of applicable silicides to low resistivity TiSi$_{2}$, CoSi$_{2}$ and NiSi. The stringent and evolving requirements in material properties imposed by continuous scaling have forced modifications to current materials or implementation of the following best candidate. The recent conversion from CoSi$_{2}$ for the 90 nm technology to NiSi in 65 nm technology and beyond represent a good example of the complexity associated with the integration of a new material. The requirements necessary to achieve performance in current devices are so stringent that even a material such as NiSi studied for more than 3 decades exhibited unexpected characteristics in very thin films and in small devices. The use of intense x-ray beams allows for the characterization of such materials in reduced dimensions and has brought to light multiple unknown behaviors. For example, the morphological stability of NiSi is much lower than originally expected, a result of the complexity in the phase sequence, of the strong anisotropy in properties related to the non-cubic crystal structure and of the very peculiar texture of these films. This early thermal degradation of the contacts has been controlled through process optimization and recently through the use of Ni alloys. In this presentation the impact of using intense x-ray sources for materials optimization will be discussed. The access to these powerful setups has allowed the rapid characterization and optimization of large parameter spaces necessary to develop the knowledge for implementation of new materials in state-of-the-art devices. [Preview Abstract] |
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