Bulletin of the American Physical Society
71st Annual Gaseous Electronics Conference
Volume 63, Number 10
Monday–Friday, November 5–9, 2018; Portland, Oregon
Session GT1: Poster Session I
3:30 PM,
Tuesday, November 6, 2018
Oregon Convention Center
Room: Exhibit Hall A1
Abstract ID: BAPS.2018.GEC.GT1.99
Abstract: GT1.00099 : Effects of charged particle dynamics, process control, and surface characteristics on spatio-temporal behavior in capacitive RF plasmas*
Preview Abstract Abstract
Authors:
S. Brandt
(West Virginia Univ)
M. Koepke
(West Virginia Univ)
A. Derzsi
(Wigner Research Centre for Physics)
Z. Donko
(Wigner Research Centre for Physics)
B. Berger
(Ruhr-Univ Bochum)
J. Schulze
(Ruhr-Univ Bochum)
D. Keil
(Lam Research Corp)
*Support from US NSF 1601080, DFG (SFB TR 87), and from Lam Research is acknowledged.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2018.GEC.GT1.99
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