Bulletin of the American Physical Society
71st Annual Gaseous Electronics Conference
Volume 63, Number 10
Monday–Friday, November 5–9, 2018; Portland, Oregon
Session GT1: Poster Session I
3:30 PM,
Tuesday, November 6, 2018
Oregon Convention Center
Room: Exhibit Hall A1
Abstract ID: BAPS.2018.GEC.GT1.98
Abstract: GT1.00098 : Numerical simulation of electromagnetic effects in very high frequency capacitively coupled plasma*
Preview Abstract Abstract
Authors:
Jian-Kai Liu
(Dalian University of Technology)
De-Qi Wen
(Michigan State University)
Yu-Ru Zhang
(Dalian University of Technology)
Yong-Xin Liu
(Dalian University of Technology)
You-Nian Wang
(Dalian University of Technology)
Collaboration:
PSEG
*This work is financially supported by the National Natural Science Foundation of China (NSFC) (Grant Nos. 11335004).
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2018.GEC.GT1.98
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