Bulletin of the American Physical Society
61st Annual Gaseous Electronics Conference
Volume 53, Number 10
Monday–Friday, October 13–17, 2008; Dallas, Texas
Session SR1: Inductively and Capacitively Coupled Plasmas
4:00 PM–5:30 PM,
Thursday, October 16, 2008
Room: Salon E
Chair: Greg Hebner, Sandia National Laboratories, Albuquerque, NM
Abstract ID: BAPS.2008.GEC.SR1.6
Abstract: SR1.00006 : The 2nd Harmonic ECR Microplasma in Narrow Closed Space for Low Pressure Conditions
5:15 PM–5:30 PM
Preview Abstract Abstract
Authors:
Hiroshi Fujiyama
(Nagasaki University)
Akihiro Yukishige
(Nagasaki University)
Ke Yan
(Nagasaki University)
Masanori Shinohara
(Nagasaki University)
Tatsuyuki Nakatani
(Toyo Advanced Technology)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2008.GEC.SR1.6
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