Bulletin of the American Physical Society
61st Annual Gaseous Electronics Conference
Volume 53, Number 10
Monday–Friday, October 13–17, 2008; Dallas, Texas
Session SR1: Inductively and Capacitively Coupled Plasmas
4:00 PM–5:30 PM,
Thursday, October 16, 2008
Room: Salon E
Chair: Greg Hebner, Sandia National Laboratories, Albuquerque, NM
Abstract ID: BAPS.2008.GEC.SR1.5
Abstract: SR1.00005 : Separate control of ion flux and energy in capacitively coupled RF discharges via the Electrical Asymmetry Effect*
5:00 PM–5:15 PM
Preview Abstract Abstract
Authors:
Julian Schulze
(Ruhr University Bochum)
Zoltan Donko
(Hungarian Academy for Science)
Brian Heil
(Ruhr University Bochum)
Uwe Czarnetzki
(Ruhr University Bochum)
*Funded by the DFG through SFB591 and GRK1051 and the Hungarian Scientific Research Fund.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2008.GEC.SR1.5
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2024 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
100 Motor Pkwy, Suite 110, Hauppauge, NY 11788
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700