Bulletin of the American Physical Society
61st Annual Gaseous Electronics Conference
Volume 53, Number 10
Monday–Friday, October 13–17, 2008; Dallas, Texas
Session SR1: Inductively and Capacitively Coupled Plasmas
4:00 PM–5:30 PM,
Thursday, October 16, 2008
Room: Salon E
Chair: Greg Hebner, Sandia National Laboratories, Albuquerque, NM
Abstract ID: BAPS.2008.GEC.SR1.3
Abstract: SR1.00003 : Electron series resonance in an inductive ion etching reactor
4:30 PM–4:45 PM
Preview Abstract Abstract
Authors:
Hyo-Chang Lee
(Electrical Engineering, Hanyang University, Republic of Korea)
Jin-Young Bang
(Electrical Engineering, Hanyang University, Republic of Korea)
Chin-Wook Chung
(Electrical Engineering, Hanyang University, Republic of Korea)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2008.GEC.SR1.3
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