Bulletin of the American Physical Society
61st Annual Gaseous Electronics Conference
Volume 53, Number 10
Monday–Friday, October 13–17, 2008; Dallas, Texas
Session SR1: Inductively and Capacitively Coupled Plasmas
4:00 PM–5:30 PM,
Thursday, October 16, 2008
Room: Salon E
Chair: Greg Hebner, Sandia National Laboratories, Albuquerque, NM
Abstract ID: BAPS.2008.GEC.SR1.2
Abstract: SR1.00002 : Comparison between fluid simulations and experiments in inductively-coupled Ar/Cl$_{2}$ plasmas
4:15 PM–4:30 PM
Preview Abstract Abstract
Authors:
Emilie Despiau-Pujo
(LPTP, Ecole Polytechnique, France)
Cormac S. Corr
(SP3, Australian National University)
Pascal Chabert
(LPTP, Ecole Polytechnique, France)
William G. Graham
(Queen's University Belfast, Northern Ireland)
Fernando G. Marro
(Queen's University Belfast, Northern Ireland)
David B. Graves
(University of California, Berkeley, USA)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2008.GEC.SR1.2
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