Bulletin of the American Physical Society
APS March Meeting 2021
Volume 66, Number 1
Monday–Friday, March 15–19, 2021; Virtual; Time Zone: Central Daylight Time, USA
Session Y30: Materials and Fabrication in Superconducting Qubits II - Materials
11:30 AM–2:30 PM,
Friday, March 19, 2021
Sponsoring
Unit:
DQI
Chair: Corey Rae McRae, University of Colorado, Boulder
Abstract: Y30.00008 : Thickness-Dependent Superconductor-Insulator Transition of TaN Thin Film Grown with Atomic Layer Deposition*
1:18 PM–1:30 PM
Live
Presenter:
Wonho Song
(Ulsan Natl Inst of Sci & Tech)
Authors:
Wonho Song
(Ulsan Natl Inst of Sci & Tech)
Sungchul Jung
(SK Hynix)
Junhyung Kim
(Ulsan Natl Inst of Sci & Tech)
Gahyun Choi
(Korea Research Inst of Standards and Science (KRISS))
Joonyoung Lee
(Korea Research Inst of Standards and Science (KRISS))
Yonuk Chong
(Sungkyunkwan University (SKKU))
Dongwoo Shin
(Pohang Univ of Sci & Tech)
Jeehoon Kim
(Pohang Univ of Sci & Tech)
Kibog Park
(Ulsan Natl Inst of Sci & Tech)
*NRF-2019R1A5A1027055, NRF-2019M3E4A1080198, CAP-18-08-KRISS
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