Bulletin of the American Physical Society
APS March Meeting 2014
Volume 59, Number 1
Monday–Friday, March 3–7, 2014; Denver, Colorado
Session H1: Poster Session II (14:00 - 17:00)
2:00 PM,
Tuesday, March 4, 2014
Room: Exhibit Hall F
Abstract ID: BAPS.2014.MAR.H1.137
Abstract: H1.00137 : Monte Carlo Simulations of Focused Electron Beam Induced Etching
Preview Abstract Abstract
Authors:
Rajendra Timilsina
(University of Tennessee Knoxville)
Philip Rack
(University of Tennessee Knoxville and Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee)
Karsten Wolff
(Carl Zeiss SMS, Industriestr 1, 64380 Ro{\ss}dorf)
Michael Budach
(Carl Zeiss SMS, Industriestr 1, 64380 Ro{\ss}dorf)
Klaus Edinger
(Carl Zeiss SMS, Industriestr 1, 64380 Ro{\ss}dorf)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2014.MAR.H1.137
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2024 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
100 Motor Pkwy, Suite 110, Hauppauge, NY 11788
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700