Bulletin of the American Physical Society
72nd Annual Gaseous Electronics Conference
Volume 64, Number 10
Monday–Friday, October 28–November 1 2019; College Station, Texas
Session QR3: Plasma Diagnostics III
1:45 PM–3:30 PM,
Thursday, October 31, 2019
Room: Century III
Chair: Brian Bentz, Sandia National Laboratories
Abstract: QR3.00003 : Analysis of PROES and OES measurements of 100 Hz pulsed Ar Capacitively Coupled Plasma*
2:15 PM–2:30 PM
Preview Abstract Abstract
Authors:
Keith Hernandez
(University of Texas at Dallas)
Matthew Goeckner
(University of Texas at Dallas)
Lawrence Overzet
(University of Texas at Dallas)
*This material is based upon work supported by Applied Materials.
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2024 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
100 Motor Pkwy, Suite 110, Hauppauge, NY 11788
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700