Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session TF1: Diagnostics II
10:30 AM–12:15 PM,
Friday, October 4, 2013
Room: Ballroom I
Chair: Azer Yalin, Colorado State University
Abstract ID: BAPS.2013.GEC.TF1.5
Abstract: TF1.00005 : Spatially resolved measurement of Ar excited species in magnetized inductively coupled plasma using multi-port optical emission spectroscopy*
11:45 AM–12:00 PM
Preview Abstract Abstract
Authors:
Yun-Gi Kim
(Department of Electrical Engineering, Pusan National University)
Chang-Seung Ha
(Department of Electrical Engineering, Pusan National University)
Moon-Ki Han
(Department of Electrical Engineering, Pusan National University)
Kwon-Sang Seo
(Department of Electrical Engineering, Pusan National University)
Dong-Hyun Kim
(Department of Electrical Engineering, Pusan National University)
Hae June Lee
(Department of Electrical Engineering, Pusan National University)
Ho-Jun Lee
(Department of Electrical Engineering, Pusan National University)
Il Gyo Koo
(Research center, SEMES)
Soojin Lee
(Research center, SEMES)
Hyo-Seong Seong
(Research center, SEMES)
*This was supported by SEMES cooperative research project.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.TF1.5
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