Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session NR1: Diagnostics I
10:00 AM–12:15 PM,
Thursday, October 3, 2013
Room: Ballroom I
Chair: Richard Miles, Princeton University
Abstract ID: BAPS.2013.GEC.NR1.7
Abstract: NR1.00007 : Diagnostics of inductively-coupled plasmas in HBr: Bromine atom and electron densities*
11:45 AM–12:00 PM
Preview Abstract Abstract
Authors:
Jean-Paul Booth
(LPP-CNRS, Ecole Polytechnique)
Nishant Sirse
(LPP-CNRS, Ecole Polytechnique)
Robert Soriano
(LPP-CNRS, Ecole Polytechnique)
Mickael Foucher
(LPP-CNRS, Ecole Polytechnique)
Pascal Chabert
(LPP-CNRS, Ecole Polytechnique)
*This work was supported by Agence Nationale de la Recherche project INCLINE (ANR-09 BLAN 0019) and by the Applied Materials University Research Partnership Program.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.NR1.7
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