Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session AM1: Workshop on Plasma Surface Interaction: From Fusion to Semiconductor Processing
8:00 AM–4:50 PM,
Monday, September 30, 2013
Room: Ballroom I
Chair: Yevgeny Raitses; Vincent Donnelly; David Graves; Greg DeTemmerman, PPPL; University of Houston; UC Berkeley; FOM Institute DIFFER
Abstract ID: BAPS.2013.GEC.AM1.7
Abstract: AM1.00007 : Low Temperature Plasma Surface Interactions: Atomic Layer Etching And Atmospheric Pressure Plasma Jet Modification Of Biomaterials*
10:20 AM–10:50 AM
Preview Abstract Abstract
Author:
Gottlieb Oehrlein
(Materials Science and Engineering, Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, MD 20742-2115)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.AM1.7
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