Bulletin of the American Physical Society
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Volume 55, Number 7
Monday–Friday, October 4–8, 2010; Paris, France
Session VF1: Capacitively-Coupled Plasmas
4:00 PM–6:00 PM,
Friday, October 8, 2010
Room: 151
Chair: Miles Turner, Dublin City University
Abstract ID: BAPS.2010.GEC.VF1.3
Abstract: VF1.00003 : The Electrical Asymmetry Effect in multi-frequency capacitively coupled radio frequency discharges*
4:45 PM–5:00 PM
Preview Abstract Abstract
Authors:
Julian Schulze
Zoltan Donko
(Hungarian Academy of Science)
Edmund Schuengel
Uwe Czarnetzki
(Ruhr-University Bochum)
*Funding: Ruhr-University Research Department Plasma, Hungarian Found for Scientific Research, Humboldt foundation.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2010.GEC.VF1.3
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