60th Gaseous Electronics Conference
Volume 52, Number 9
Tuesday–Friday, October 2–5, 2007;
Arlington, Virginia
Session RR2: Electron-Molecule Collisions
1:30 PM–3:45 PM,
Thursday, October 4, 2007
Doubletree Crystal City
Room: Crystal Ballroom B
Chair: Rich Fernsler, Naval Research Laboratory
Abstract ID: BAPS.2007.GEC.RR2.1
Abstract: RR2.00001 : Electron-Driven Ionization of Processing Gases: Status and Perspectives
1:30 PM–2:00 PM
Preview Abstract
Abstract
Author:
Kurt Becker
(Polytechnic University)
In 1985, experimentally determined absolute partial and total
electron-impact ionization cross sections for 31 molecules had
been reported in the literature [1]. Today, the number of
molecules, for which cross sections have been measured, exceeds
100. Experimental ion formation studies have included work
involving free radicals and clusters as targets as well as the
study of metastable ionic decay routes. Much effort has been
devoted to the study of electron-driven ionization of molecules
and free radicals of importance top the plasma processing
community. These include many halogen-bearing species, but also
molecules such as diborane and silane. While a rigorous, fully
quantum mechanical theoretical treatment of molecular ionization
processes is still impossible (because of the complexity of the
ionization process and the complexity of the targets under
study), semi-rigorous approaches such as the method of Khare and
co-workers, the Binary Encounter Bethe (BEB) approach of Kim and
co-workers, and the Deutsch-M\"{a}rk (DM) formalism (see Ref. [2]
for details of these theoretical approaches) have made
[2] significant progress.
This talk will review recent progress in the experimental (and to
a lesser extent theoretical) progress in the field of
electron-induced ionization of processing gases. Special emphasis
will be placed on recent studies of the electron-impact
ionization of Cl-bearing molecules and radicals and the
respective role direct vs. indirect ionization processes for
these targets.
This work was supported by the Chemical Sciences,
Geosciences, and Biosciences Division, Office of Basic Energy
Sciences, US Department of Energy.
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[1] ``Electron Impact ionization'', T.D. M\"{a}rk, G.H. Dunn
(editors), Springer Verlag: Vienna (1985)
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[2] H. Deutsch, K. Becker, S. Matt, and T.D. M\"{a}rk, Int. J.
Mass Spectrom. \underline {\textit{197}}, 37 (2000)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2007.GEC.RR2.1