Bulletin of the American Physical Society
60th Gaseous Electronics Conference
Volume 52, Number 9
Tuesday–Friday, October 2–5, 2007; Arlington, Virginia
Session ET2: Electronegative Plasmas
4:00 PM–6:00 PM,
Tuesday, October 2, 2007
Doubletree Crystal City
Room: Crystal Ballroom B
Chair: Matt Goeckner, University of Texas at Dallas
Abstract ID: BAPS.2007.GEC.ET2.6
Abstract: ET2.00006 : Plasma Characterization of Electronegatively diluted VHF CCP Plasmas
5:30 PM–5:45 PM
Preview Abstract Abstract
Authors:
Alex Paterson
(Applied Materials)
Ned Hammond
(Applied Materials)
Shahid Rauf
(Applied Materials)
Ed Barnat
(Sandia National Laboratories)
Paul Miller
(Sandia National Laboratories)
Greg Hebner
(Sandia National Laboratories)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2007.GEC.ET2.6
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