Bulletin of the American Physical Society
60th Gaseous Electronics Conference
Volume 52, Number 9
Tuesday–Friday, October 2–5, 2007; Arlington, Virginia
Session DT1: Materials Processing in Low Pressure Plasmas I: Etching, deposition, new materials
1:30 PM–3:30 PM,
Tuesday, October 2, 2007
Doubletree Crystal City
Room: Crystal Ballroom A
Chair: Shahid Rauf, Applied Materials
Abstract ID: BAPS.2007.GEC.DT1.7
Abstract: DT1.00007 : Student Excellence Award Finalist: Ion Flux and Energy Measurement at a Pulsed Biased Electrode in a C$_{2}$H$_{2}$:Argon Inductively Coupled Plasma During DLC Growth.
3:15 PM–3:30 PM
Preview Abstract Abstract
Authors:
A. Baby
(Nanotechnology and Integrated BioEngineering Centre, University of Ulster)
C.M.O. Mahony
(Nanotechnology and Integrated BioEngineering Centre, University of Ulster)
P.D. Maguire
(Nanotechnology and Integrated BioEngineering Centre, University of Ulster)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2007.GEC.DT1.7
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