Bulletin of the American Physical Society
2005 TSAPS/AAPT/SPS Joint Fall Meeting
Thursday–Saturday, October 20–22, 2005; Houston, TX
Session P2: Plenary II: Industrial Applications of Physics |
Hide Abstracts |
Room: Conrad Hilton Ballroom S202 |
Friday, October 21, 2005 1:00PM - 1:30PM |
P2.00001: Industrial Applications for Synchrotron Radiation Invited Speaker: |
Friday, October 21, 2005 1:30PM - 2:00PM |
P2.00002: Plasma Science in Semiconductor Manufacturing Invited Speaker: Plasma processes are ubiquitous in semiconductor manufacturing. In CMOS manufacturing alone, plasma processes play a significant role in the industry meeting gate patterning resolution limits and interconnect density targets so that Moore’s Law is followed. Related to fusion and space plasmas, technological plasmas in semiconductor manufacturing are more often than not low temperature non-equilibrium plasmas associated with fluorescent lamps and lasers. It is the high electron temperature (electron volt order), low heavy species temperatures and conformal electric field skin shielding surfaces from plasmas in a conformal manner that enable low temperature non-equilibrium plasmas to be used to etch and deposit material into all manner of materials and geometries for the fabrication of electronic devices. In addition to experiment, complex mix of plasma chemistry, plasma dynamics and materials interaction models are required to describe how plasmas are used to fabricate electronic devices. Fortunately, plasma science has drawn on years of research related to plasmas for lighting, beam plasmas and gas insulators to build a comprehensive set of numerical and diagnostic capabilities based on which plasma processes can be engineered. The state of plasma science in semiconductor manufacturing will be discussed including plasma sources for EUV lithography, plasmas for displays, plasma deposition of novel materials such as nanotubes, and purely neutral plasma processes. [Preview Abstract] |
Friday, October 21, 2005 2:00PM - 2:30PM |
P2.00003: Geophysics at an Oil Company Invited Speaker: |
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2024 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
100 Motor Pkwy, Suite 110, Hauppauge, NY 11788
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700