Transparent Conductive Oxide by Pulsed Laser Deposition: Zn$_{2}$In$_{2}$O$_{5}$*

Zn$_{2}$In$_{2}$O$_{5}$ (ZIO) belongs to the class of transparent conductive oxides, in which wide band-gap and high conductivity coexist. A systematic study on the influence of pulsed laser deposition parameters on the electro-optical properties of ZIO thin films is carried out. Electron mobility up to 40 cm$^{2}$/Vs and conductivity of 2000 S/cm are obtained in textured-crystalline and amorphous films. An indirect band-gap around 3 eV and low absorption in the visible range are characteristic qualities of ZIO films.