Scanning multiprobe microscopy for mesoscopic devices and materials: Part I

New sensor development for the characterization of quantum materials and devices is crucial to investigating contemporary questions in condensed matter physics.  Moreover, various experimental challenges such as sensitivity to air and thermal cycling, twist angle disorder, and charge inhomogeneity make comparisons between devices and experimental runs difficult. Multimodal measurements overcome these challenges, while enabling increased throughput. Here, we present progress on the development of a generic multimodal scanning probe microscopy platform we call ‘multiprobe microscopy’, which allows us to bring an ensemble of silicon nanofabrication compatible sensors close (10s of nm) to samples in cryogenic environments. In part one of this talk, I will discuss the principles of this technique and describe the wafer scale nanofabrication processes we use to develop this platform.