2D Semiconductors from Spin-on Molecular Chemistries for Direct Large-Scale Integration

In this talk, I will discuss our recent developments centered on a process to produce fully soluble solutions from a unique molecular chemistry. This enables the creation of wafer-scale monolayers of MoS₂, a prominent 2D semiconductor for logic and memory devices. This molecule can be dissolved in common solvents and spin-coated onto various substrates, including crystalline substrates, printed electrodes, and polymers. It can also be integrated into gate-all-around (GAA) 3D transistor structures for logic devices. Our method of rapidly synthesizing large-area MoS₂ films, particularly in monolayer form via spin-coating, represents a novelty, as it hasn't been demonstrated previously with a single-source chemistry. This advancement is a significant step toward scalable synthesis of wafer-scale 2D semiconductor thin films, eliminating the need for post-growth wafer transfer techniques, a requirement with films grown by chemical vapor deposition (CVD) methods. Our fabrication process highlights the potential of using a single-source chemical precursor to develop monolayer 2D semiconductors that exhibit commendable transport characteristics and optical properties, which enhance with rising crystallization temperatures. Consequently, it holds promise as a semiconductor for microelectronic transistor channels in both back-end-of-line (BEOL) and front-end-of-line (FEOL) architectures.