Bulletin of the American Physical Society
APS March Meeting 2024
Monday–Friday, March 4–8, 2024; Minneapolis & Virtual
Session OD01: V: On-Demand Presentations - Available throughout March Meeting
6:00 AM,
Sunday, March 3, 2024
Abstract: OD01.00043 : Integration of perovskite based transparent conducting oxides on industrial substrates: the key role of the glass substrate properties and binary oxides seed layers*
Presenter:
Moussa Mezhoud
(Normandie Univ, ENSICAEN, UNICAEN, CNRS, CRISMAT, 6, boulevard du Maréchal Juin, F- 14050 Caen, France.)
Authors:
Moussa Mezhoud
(Normandie Univ, ENSICAEN, UNICAEN, CNRS, CRISMAT, 6, boulevard du Maréchal Juin, F- 14050 Caen, France.)
Axel Rouviller
(CIMAP, CNRS, ENSICAEN, UNICAEN, Normandie Univ, 6, boulevard du Maréchal Juin, F- 14050 Caen, France.)
Martando Rath
(Normandie Univ, ENSICAEN, UNICAEN, CNRS, CRISMAT, 6, boulevard du Maréchal Juin, F- 14050 Caen, France.)
Oualyd El-Khaloufi
(Normandie Univ, ENSICAEN, UNICAEN, CNRS, CRISMAT, 6, boulevard du Maréchal Juin, F- 14050 Caen, France)
Sylvain Duprey
(CIMAP, CNRS, ENSICAEN, UNICAEN, Normandie Univ, 6, boulevard du Maréchal Juin, F- 14050 Caen, France)
Julien Cardin
(CIMAP, CNRS, ENSICAEN, UNICAEN, Normandie Univ, 6, boulevard du Maréchal Juin, F- 14050 Caen, France)
Christophe Labbe
(CIMAP, CNRS, ENSICAEN, UNICAEN, Normandie Univ, 6, boulevard du Maréchal Juin, F- 14050 Caen, France)
Arnaud Fouchet
(Normandie Univ, ENSICAEN, UNICAEN, CNRS, CRISMAT, 6, boulevard du Maréchal Juin, F- 14050 Caen, France)
Adrian David
(Normandie Univ, ENSICAEN, UNICAEN, CNRS, CRISMAT, 6, boulevard du Maréchal Juin, F- 14050 Caen, France)
Wilfrid Prellier
(Normandie Univ, ENSICAEN, UNICAEN, CNRS, CRISMAT, 6, boulevard du Maréchal Juin, F- 14050 Caen, France)
Ulrike Lüders
(Normandie Univ, ENSICAEN, UNICAEN, CNRS, CRISMAT, 6, boulevard du Maréchal Juin, F- 14050 Caen, France)
In this presentation, we introduce an innovative approach to the integration of SVO thin films onto industrial substrates, such as glass or silicon. Our method uses a TiO2 seed layer to facilitate growth and enhance crystalline quality of SVO films. The resulting thin films are polycrystalline in nature, exhibiting remarkably low electrical resistivity of about 400 µΩ.cm and good optical transparency exceeding 70%. These characteristics underline the immense potential of these films for a wide range of electronic applications.
Furthermore, our study also focuses on the intricate interplay between the chemical and thermal properties of the substrate, specifically glass, and their influence on the properties of SVO thin films. A deeper understanding of these substrate properties not only contributes to optimizing the growth process but also highlights the critical role of the substrate in achieving the desired properties of these new TCOs materials.
*CNRS and Region Normandie
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