Bulletin of the American Physical Society
APS March Meeting 2024
Monday–Friday, March 4–8, 2024; Minneapolis & Virtual
Session M64: Optoelectronic and Photovoltaic Energy Conversion
8:00 AM–10:24 AM,
Wednesday, March 6, 2024
Room: 211AB
Sponsoring
Unit:
GERA
Chair: Simo Pajovic, Massachusetts Institute of Technology
Abstract: M64.00008 : Virtual substrates for wide bandgap AlyX1-yN growth*
9:24 AM–9:36 AM
Presenter:
Dennice Roberts
(National Renewable Energy Laboratory (NREL))
Author:
Dennice Roberts
(National Renewable Energy Laboratory (NREL))
In this work, (111)-oriented TaC and ZrN are grown by RF sputtering and optimized as substrate layers for AlyGa1-yN and AlyGd1-yN, respectively. TaC is demonstrated as a full proof of concept. (111)-stabilized TaC layers with a rock-salt crystal structure are annealed to improve surface crystal quality and surface morphology and then used as a template for growth of an Al0.7Ga0.3N layer by molecular beam epitaxy. X-ray diffraction (XRD) demonstrates epitaxial registry of the grown layer to the substrate. High resolution transmission electron microscopy (TEM) is used to investigate interface behavior, showing regions of abrupt interface transitions and nitrogen polar termination of the Al0.7Ga0.3N. We also grew (111)-oriented ZrN on Ti-Zr-N graded buffer layers as a lattice-matched virtual substrate for AlyGd1-yN. Structure, morphology, and strain are analyzed using XRD and atomic force microscopy. Structure and quality of initial Al0.8Gd0.2N thin films are investigated for both in-situ and ex-situ growths.
*This work was authored by the National Renewable Energy Laboratory, operated by Alliance for Sustainable Energy, LLC, for the U.S. Department of Energy (DOE) under Contract No. DE-AC36-08GO28308. The U.S. Department of Energy Office of Science provided funding for this research collaboratively from the Office of Basic Energy Sciences, Division of Materials Science and the Advanced Scientific Computing Research (ASCR) program.
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