Bulletin of the American Physical Society
APS March Meeting 2024
Monday–Friday, March 4–8, 2024; Minneapolis & Virtual
Session M47: Superconducting Qubits: Metal Films I
8:00 AM–11:00 AM,
Wednesday, March 6, 2024
Room: 200CD
Sponsoring
Units:
DQI DCMP DMP
Chair: Anthony McFadden, University of California, Santa Barbara
Abstract: M47.00009 : Low-Temperature MBE growth of superconducting Ta films on Silicon and Sapphire substrates*
9:36 AM–9:48 AM
Presenter:
Teun van Schijndel
(University of California, Santa Barbara)
Authors:
Chris Palmstrom
(University of California, Santa Barbara)
Aaron N Engel
(University of California, Santa Barbara)
Teun van Schijndel
(University of California, Santa Barbara)
Jason T Dong
(University of California, Santa Barbara)
Anthony McFadden
(National Institute of Standards and Technology, Boulder)
Raymond W Simmonds
(National Institute of Standards and Technology, Boulder)
Here, we demonstrate low-temperature MBE growth (<20K) to stabilize alpha-Ta independent of the substrate without using a seed layer enabling its integration with various material systems. We characterize the growth of alpha-Ta on several substrates including amorphous SiNx, Si(111), GaAs(001), and Al2O3(0001). Both structural and electrical measurements indicate the successful growth of α-Ta with good superconducting properties independent of the substrate. Finally, we fabricate CPW resonator circuits and 2D Transmon qubits to compare α-Ta on Si and Sapphire substrates under the same growth conditions.
1) Place, A.P.M., et al., Nat Commun 12, 1779 (2021).
2) Wang, C., et al., npj Quantum Inf 8, 3 (2022).
*Supported by ARO W911NF2210052 and UCB NSF Quantum Foundry funded via the Q-AMASE-i program under award DMR-1906325
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