Bulletin of the American Physical Society
APS March Meeting 2024
Monday–Friday, March 4–8, 2024; Minneapolis & Virtual
Session M47: Superconducting Qubits: Metal Films I
8:00 AM–11:00 AM,
Wednesday, March 6, 2024
Room: 200CD
Sponsoring
Units:
DQI DCMP DMP
Chair: Anthony McFadden, University of California, Santa Barbara
Abstract: M47.00003 : Microstrip resonators with internal quality factors over one million made from MBE-Al films capped with an in-situ deposited oxide layer*
8:24 AM–8:36 AM
Presenter:
Kuan-Hui Lai
(National Taiwan University)
Authors:
Kuan-Hui Lai
(National Taiwan University)
Yen-Hsun Glen Lin
(National Tsing Hua University)
Lawrence B Young
(National Taiwan University)
Wan-Sin Chen
(National Taiwan University)
Chao-Kai Cheng
(National Taiwan University)
Wei-Jie Yan
(National Tsing Hua University)
Yen-Hsiang Lin
(National Tsing Hua University)
Jueinai Kwo
(National Tsing Hua University)
Minghwei Hong
(National Taiwan University)
Here, we present high-quality Al resonators fabricated on sapphire. The single-crystal Al films were grown by molecular beam epitaxy (MBE) and were immediately capped with a stoichiometric Al2O3 layer which was in-situ deposited on the Al film using e-beam evaporation. This unique approach is appealing since it provides an oxide layer with uniform and controllable thickness to protect the underlying superconducting film, which cannot be achieved by the conventional oxidation method. The high-quality Al2O3 layer suppressed the formation of two-level systems and thus reduced the energy relaxation channels. With this approach and an optimized fabrication process, we demonstrated resonators with Qi exceeding one million at 5.1 GHz in a single photon limit.
*This work is supported by the National Science and Technology Council (NSTC), Taiwan through grant number NSTC 112-2119-M-007 -009 -.
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