Bulletin of the American Physical Society
APS March Meeting 2024
Monday–Friday, March 4–8, 2024; Minneapolis & Virtual
Session M47: Superconducting Qubits: Metal Films I
8:00 AM–11:00 AM,
Wednesday, March 6, 2024
Room: 200CD
Sponsoring
Units:
DQI DCMP DMP
Chair: Anthony McFadden, University of California, Santa Barbara
Abstract: M47.00015 : Heteroepitaxial oxide/α-Ta(110) films on sapphire(11-20) – growth, structure, transport, and microwave properties*
10:48 AM–11:00 AM
Presenter:
Yi-Ting Cheng
(Department of Physics, National Tsing Hua University)
Authors:
Yi-Ting Cheng
(Department of Physics, National Tsing Hua University)
Hsien-Wen Wan
(Graduate Institute of Applied Physics and Dept. of Physics, National Taiwan University)
Chao-Kai Cheng
(Graduate Institute of Applied Physics and Dept. of Physics, National Taiwan University)
Ko-Hsuan Chen
(Department of Physics, National Tsing Hua University)
Jui-Min Chia
(Department of Physics, National Tsing Hua University)
Chia-Hung Hsu
(National Synchrotron Radiation Research Center)
Yen-Hsiang Lin
(Department of Physics, National Tsing Hua University)
Jueinai Kwo
(Department of Physics, National Tsing Hua University)
Minghwei Hong
(Graduate Institute of Applied Physics and Dept. of Physics, National Taiwan University)
α-Ta films 35 nm in thickness grew epitaxially in (110) orientation on (11-20) sapphire substrates, followed with in-situ growth of epitaxial and amorphous Al2O3 films. The presence of Pendellösung fringes indicates a high degree of structural coherence over the entire film thickness. The root mean square roughness of the Ta films is 0.8 nm. After the in-situ oxide deposition, the surface roughness decreases to 0.47 nm. The Ta film has a critical temperature of 4.29 K and a high residual resistance ratio of 16.
1. Crowley et al., PRX 13, 041005 (2023).
2. Kwo et al., Appl. Phys. Lett. 49, 319 (1986).
3. Lin et al., J. Cryst. Growth 512, 223 (2019).
*The support from the Natl. Sci. Technol. Council in Taiwan through NSTC 112-2119-M-007-009 and 112-2811-M-007-056 is acknowledged.
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