Bulletin of the American Physical Society
APS March Meeting 2024
Monday–Friday, March 4–8, 2024; Minneapolis & Virtual
Session K15: Superconducting Junctions and Lattices
3:00 PM–5:48 PM,
Tuesday, March 5, 2024
Room: M100F
Sponsoring
Unit:
DCMP
Chair: Daniel Silevitch, Caltech
Abstract: K15.00003 : Dielectric Function of Tantalum Nitride Formed by Atomic Layer Deposition on 300 mm Wafers for Josephson junction applications*
3:24 PM–3:36 PM
Presenter:
Aaron Lopez Gonzalez
(New Mexico State University)
Authors:
Aaron Lopez Gonzalez
(New Mexico State University)
Yoshitha Hettige
(New Mexico State University)
Jaden R Love
(New Mexico State University)
Stefan Zollner
(New Mexico State University)
Ekta Bhatia
(NYCREATES/University at Albany SUNY)
Tuan Vo
(NYCREATES)
Satyavolu S Papa Rao
(NYCREATES/University at Albany SUNY)
Tantalum nitride layers with 12 nm and 25 nm thickness were formed on top of SiO2 by atomic layer deposition. The TaN layer thicknesses and surface roughness were confirmed by x-ray reflectance (XRR). On a vertical J.A. Woollam ellipsometer (V-VASE), the ellipsometric angles ψ and Δ were acquired at room temperature at incidence angles from 50° to 80° and photon energies from 0.5 to 6.5 eV. We also acquired the infrared ellipsometric spectra at the same angles of incidence from 0.03 to 0.70 eV on a J.A. Woollam infrared ellipsometer. We developed an ellipsometry model for the optical constants of the oxide using three Gaussian oscillators at 56, 132, and 146 meV in the infrared spectral region and a pole at 11 eV (fixed) with variable amplitude. The TaN layers were described with a Tauc-Lorentz oscillator centered at 3.2 eV with a band gap at 1.7 eV, one UV pole, and one Gaussian in the UV. We also performed measurements at low temperatures of 80 K and 190 K at an angle of incidence of 70° to investigate the temperature dependence of the optical constants and oscillators for the TaN layer.
*The work at NMSU was supported by the Air Force Office of Scientific Research (AFOSR) under Award No. FA9550-20-1-0135. A.L.G. acknowledges support from the New Mexico Alliance for Minority Participation (NMAMP).
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