Bulletin of the American Physical Society
APS March Meeting 2022
Volume 67, Number 3
Monday–Friday, March 14–18, 2022; Chicago
Session Z39: Spin Qubit Arrays II
11:30 AM–2:18 PM,
Friday, March 18, 2022
Room: McCormick Place W-196A
Sponsoring
Units:
DQI DCMP
Chair: Anthony Sigillito, UPenn
Abstract: Z39.00005 : Characterization of Silicon MOS quantum dots fabricated in a full 300mm CMOS process for spin qubit applications*
12:42 PM–12:54 PM
Presenter:
Asser Elsayed
(KU Leuven, IMEC)
Authors:
Asser Elsayed
(KU Leuven, IMEC)
Ruoyu Li
(IMEC)
Clement Godfrin
(IMEC)
Nard Dumoulin Stuyck
(IMEC)
Stefan Kubicek
(IMEC)
Julien Jussot
(IMEC)
Yann Canvel
(IMEC)
Shana Massar
(IMEC)
Fahd A. Mohiyaddin
(IMEC)
Mohamed K Shehata
(KU Leuven, IMEC)
George Simion
(IMEC)
Pol Van Dorpe
(KU Leuven, IMEC)
Iuliana Radu
(IMEC)
Bogdan Govoreanu
(IMEC)
We address this challenge by fabricating quantum dot arrays in a state-of-the-art 300mm fully CMOS compatible fabrication process, employing both e-beam and optical lithography [5]. We present the fabrication and electrical characterization of well-controlled quantum dots formed in a Si-MOS substrate. Additionally, we discuss the effect of process induced defects and device uniformity, both crucial for large qubit arrays. These results provide important feedback necessary for future upscaling of spin qubits.
[1] Li et al., Science Adv., 4(7) (2018)
[2] Vandersypen et al., npj Quantum Information 3.1 (2017)
[3] Yoneda et al., Nature Nanotech. 13 (2018)
[4] Chan et al., Nano Letters 21.3 (2021)
[5] Li et al., Proc. of IEDM (2020)
*This work was supported in part by the imec Industrial Affiliation Program for quantum computing.
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