Bulletin of the American Physical Society
APS March Meeting 2022
Volume 67, Number 3
Monday–Friday, March 14–18, 2022; Chicago
Session Z39: Spin Qubit Arrays II
11:30 AM–2:18 PM,
Friday, March 18, 2022
Room: McCormick Place W-196A
Sponsoring
Units:
DQI DCMP
Chair: Anthony Sigillito, UPenn
Abstract: Z39.00011 : Uniform and tuneable 'all-silicon' spin qubit devices in a 300mm integrated process*
1:54 PM–2:06 PM
Presenter:
Nard Dumoulin Stuyck
(IMEC)
Authors:
Nard Dumoulin Stuyck
(IMEC)
Roy Li
(imec)
Clement Godfrin
(imec)
Asser Elsayed
(KU Leuven)
Fahd Mohiyaddin
(imec)
Stefan Kubicek
(imec)
Julien Jussot
(imec)
Yann Canvel
(imec)
Shana Massar
(imec)
George Simion
(imec)
Marc Heyns
(KU Leuven, imec)
Iuliana Radu
(TSMC)
Bogdan Govoreanu
(imec)
We address this challenge by employing a state-of-the-art ‘all-silicon’ 300mm fabrication process [5-6]. In this talk, we present latest results on the integration of highly tuneable and uniform Si-MOS spin qubit devices in a lithographically flexible integration scheme, which combines e-beam and optical lithography. Low temperature device performance will be discussed, along with the main challenges for further development.
[1] Yoneda et al., Nature Nanotech. 13 (2018)
[2] Veldhorst et al., Nature Comm., 8(1) (2017)
[3] Li et al., Science Adv., 4(7) (2018)
[4] Mohiyaddin et al., Proc. of IITC (2019)
[5] Govoreanu et al., Si Nanoelectronics Workshop (2019)
[6] Dumoulin Stuyck et al., VLSI (2021)
*This work was performed as part of imec’s Industrial Affiliation Program on Quantum Computing.N. I. Dumoulin Stuyck gratefully acknowledges FWO-Vlaanderen for a Strategic Basic Research PhD fellowship, application number 1S60020N.
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2024 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
100 Motor Pkwy, Suite 110, Hauppauge, NY 11788
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700