Multislice model to simulate Grazing Incidence Small Angle X-ray Scattering (GISAXS) of micro-scale patterns

Multislice simulations are widely used in transmission geometry electron microscopy and X-ray transmission experiments such as conventional lensless X-ray coherent diffraction imaging (CDI). To study nanostructures on thick substrates, a reflection-geometry scattering technique such as Grazing Incident Small Angle X-ray Scattering (GISAXS) is required. Here, we prove that multislice simulations are also applicable to the GISAXS geometry and can reproduce dynamical scattering from multiple layers on substrate. We took GISAXS images of many micro-scale multi-layered 3D patterns and simulated the scattering patterns using the multislice formalism.