Bulletin of the American Physical Society
APS March Meeting 2022
Volume 67, Number 3
Monday–Friday, March 14–18, 2022; Chicago
Session G00: Poster Session I (2pm- 5pm CST)
2:00 PM,
Tuesday, March 15, 2022
Room: McCormick Place Exhibit Hall F1
Abstract: G00.00339 : Fabrication of photonic crystal mirror into a silicon nitride membrane resonator*
Presenter:
Bre' Anna Sherman
(University of Alaska Anchorage)
Authors:
Bre' Anna Sherman
(University of Alaska Anchorage)
Aman Agrawal
(University of Arizona)
Dalziel J Wilson
(University of Arizona)
Collaborations:
Integrated Optics for Undergraduate Native Americans (IOU-NA), Center for Quantum Networks (CQN), French National Centre for Scientific Research (CNRS)
quantum optomechanics experiments. A key limitation is their low
reflectivity, which limits their optomechanical coupling strength.
Here we report efforts to improve the reflectivity of a silicon
nitride membrane by patterning a photonic crystal (PtC) mirror into
it. Our aim is to embed PtC mirrors into trampoline-like membranes
suspended from millimeter-long nanotethers. The main challenge is the
extreme aspect ratio and high tensile stress near the tether clamps,
which make them highly susceptible to breakage. We overcome this
challenge by using a combination of dry and wet etching techniques to
minimize the influence of turbulence, capillary, and thermal gradient
forces during the release process. Trampolines with a reflectivity
greater than 80% at 860 nm were realized. Ultimately these structures
will be integrated into optical cavities for quantum-limited
accelerometry and electro-optic conversion applications.
*The authors would like to acknowledge support from the National Science Foundation through grant number #1359163. This work was supported by the NSF Engineering Research Center for Quantum Networks (CQN), #1941583
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