Bulletin of the American Physical Society
APS March Meeting 2022
Volume 67, Number 3
Monday–Friday, March 14–18, 2022; Chicago
Session D39: Semiconductor Qubits II
3:00 PM–6:00 PM,
Monday, March 14, 2022
Room: McCormick Place W-196A
Sponsoring
Units:
DQI DCMP
Chair: Mark Gyure, UCLA
Abstract: D39.00010 : Quantitative strain mapping in Si0.7Ge0.3/Si/ Si0.7Ge0.3 heterostructures for spin qubits
5:12 PM–5:24 PM
Presenter:
Cedric Corley-Wiciak
(IHP - Leibniz Institute for Innovations for High Performance)
Authors:
Cedric Corley-Wiciak
(IHP - Leibniz Institute for Innovations for High Performance)
Carsten Richter
(IKZ – Leibniz -Institut für Kristallzüchtung)
Wolfgang M Klesse
(IHP - Leibniz Institute for Innovations for High Performance Microelectronics)
Eduardo Zatterin
(ESRF – European Synchrotron Radiation Facility)
Tobias Schuelli
(ESRF – European Synchrotron Radiation Facility)
Agnieszka A Corley-Wiciak
(IHP - Leibniz Institute for Innovations for High Performance Microelectronics)
Ignatii Zaitsev
(IHP - Leibniz Institute for Innovations for High Performance Microelectronics)
Costanza L Manganelli
(IHP - Leibniz Institute for Innovations for High Performance Microelectronics)
Giovanni Capellini
(Dipartimento di Scienze, Universita Roma Tre; IHP - Leibniz Institute for Innovations for High Performance Microelectronics)
Michele Virgilio
(Università di Pisa)
Wolfram Langheinrich
(Infineon Technologies Dresden GmbH&Co.KG,)
Ketan Anand
(IHP - Leibniz Institute for Innovations for High Performance Microelectronics)
Yuji Yamamoto
(IHP - Leibniz Institute for Innovations for High Performance Microelectronics)
Marvin H Zoellner
(IHP - Leibniz Institute for Innovations for High Performance Microelectronics)
Malte Neul
(RWTH Aachen University,)
Lars R Schreiber
(RWTH Aachen University,)
Inga Seidler
(RWTH Aachen University)
Ran Xue
(RWTH Aachen University)
Yujia Liu
(IKZ - Leibniz - Institut für Kristallzüchtung)
The Si/SiGe material system is promising for large-scale integration of solid state qubits due to the demonstration of high coherence times and multi-qubit algorithms. One key requirement for realizing large arrays of qubits with shared gate control is a high degree of homogeneity of the lattice strains. Here, we leverage Scanning Xray Diffraction Microscopy (SXDM) at ID01/ESRF to investigate non-destructively the lattice homogeneity in Si/SiGe heterostructures. We map the strain tensor in a 10 nm thick Si QW with a lateral resolution below 50 nm and determine local strain variations larger than 1e-4. Based on the experimental data, we perform Finite Element Method (FEM) thermomechanical simulations to calculate the strain distribution at low temperature. Furthermore, the strain maps are translated into spatially resolved profiles for the energy of the conduction band valley state, the variation of which is found to be of the magnitude as the charging energy of an electrostatic quantum dot of approx. 1 meV
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