Bulletin of the American Physical Society
APS March Meeting 2022
Volume 67, Number 3
Monday–Friday, March 14–18, 2022; Chicago
Session B41: New Techniques and Design in Superconducting Qubits I
11:30 AM–2:30 PM,
Monday, March 14, 2022
Room: McCormick Place W-196C
Sponsoring
Units:
DQI DMP DCMP
Chair: Zlatko Minev, IBM
Abstract: B41.00011 : A polymer-based spacer process for improved parameter targeting in 3D-integrated superconducting circuits*
1:54 PM–2:06 PM
Presenter:
Graham J Norris
(ETH Zurich)
Authors:
Graham J Norris
(ETH Zurich)
Michael Kerschbaum
(ETH Zurich)
Jean-Claude Besse
(ETH Zurich)
Christopher Eichler
(ETH Zurich)
Andreas Wallraff
(ETH Zurich)
[1] Rosenberg et al., IEEE Microw. Mag. 21, 72 (2020)
[2] Gold et al., npj Quantum Inf. 7, 142 (2021)
*The authors acknowledge financial support by the EU Flagship on Quantum Technology H2020-FETFLAG2018-03 project 820363 OpenSuperQ, by the Office of the Director of National Intelligence (ODNI), Intelligence Advanced Research Projects Activity (IARPA), via the U.S. Army Research Office grant W911NF-16-1-0071, by the National Centre of Competence in Research Quantum Science and Technology (NCCR QSIT), a research instrument of the Swiss National Science Foundation (SNSF), by the SNFS R'equip grant 206021-170731 and by ETH Zurich.
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