Bulletin of the American Physical Society
APS March Meeting 2021
Volume 66, Number 1
Monday–Friday, March 15–19, 2021; Virtual; Time Zone: Central Daylight Time, USA
Session M67: Exhibitor Workshop: Oxford Instruments – ALD and Plasma Tools for Better Quantum DevicesExhibitor Workshop Live
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Sponsoring Units: APS |
Wednesday, March 17, 2021 12:00PM - 1:00PM Live |
M67.00001: ALD and Plasma Tools for Better Quantum Devices Russ Renzas Next-generation quantum computers require better materials and processes to reduce losses associated with substrate-metal, metal-vacuum, and substrate-vacuum interfaces in superconducting systems, as well as losses due to roughness in diamond and photonic systems. Low-loss superconducting nitrides deposited by PE-ALD with in-situ surface preparation offer improved performance for resonators and qubits, while high quality etches achieve low roughness and reduce losses at substrate-vacuum interfaces. We will also discuss the importance of these techniques for low roughness diamond and photonic etches, superconducting 3D integration, and Superconducting Nanowire Single Photon Detectors. |
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